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Parameter Design of Film Forming Process to Control Spatial Distribution of Film Thickness
https://mejiro.repo.nii.ac.jp/records/25
https://mejiro.repo.nii.ac.jp/records/25312a6c02-41c8-4cd4-b33e-59d5ff84bec6
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
MJM_15_35.pdf (452.0 kB)
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| Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2017-11-10 | |||||
| タイトル | ||||||
| タイトル | Parameter Design of Film Forming Process to Control Spatial Distribution of Film Thickness | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| キーワード | ||||||
| 言語 | en | |||||
| 主題Scheme | Other | |||||
| 主題 | Design of experiments | |||||
| キーワード | ||||||
| 言語 | en | |||||
| 主題Scheme | Other | |||||
| 主題 | Robust parameter design | |||||
| キーワード | ||||||
| 言語 | en | |||||
| 主題Scheme | Other | |||||
| 主題 | Depiction variables | |||||
| キーワード | ||||||
| 言語 | en | |||||
| 主題Scheme | Other | |||||
| 主題 | Electroplating process | |||||
| キーワード | ||||||
| 言語 | en | |||||
| 主題Scheme | Other | |||||
| 主題 | Distribution profile feature quantities | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | departmental bulletin paper | |||||
| 著者 |
三井, 正
× 三井, 正× MITSUI, Tadashi |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | I n the ma nufacturing process of a ny mecha nical parts with spatially varied characteristics, controlling a characteristics distribution is important depending on its intended use. In the electroplating process, it is desirable to form a thin film with different thickness on different local positions on the base material. Therefore, it is necessary to achieve a specific profile of film thickness distribution. Although the conventional robust parameter design have been used to make a uniform film, it is difficult to design a custom profile of film thickness distribution under various constraints. Considering this situation, we propose a parameter design method to control a spatial distribution in a custom profile with a parameter design. Three regression parameters corresponding to feature quantities of a distribution are designed as multi-objects. The effect of the method will be verified for an electric plating process as a case study. Also an application to control the profile based on this approach will be introduced. | |||||
| 書誌情報 |
目白大学経営学研究 en : Mejiro Journal of Managemant 号 15, p. 35-46, 発行日 2017-03-31 |
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| 出版者 | ||||||
| 出版者 | 目白大学 | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 1348-5776 | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA11843415 | |||||
| 権利 | ||||||
| 権利情報 | 目白大学 | |||||
| フォーマット | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | ||||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
