@article{oai:mejiro.repo.nii.ac.jp:00000025,
 author = {三井, 正 and MITSUI, Tadashi},
 issue = {15},
 journal = {目白大学経営学研究, Mejiro Journal of Managemant},
 month = {Mar},
 note = {pdf, I n the ma nufacturing process of a ny mecha nical parts with spatially varied characteristics, controlling a characteristics distribution is important depending on its intended use. In the electroplating process, it is desirable to form a thin film with different thickness on different local positions on the base material. Therefore, it is necessary to achieve a specific profile of film thickness distribution. Although the conventional robust parameter design have been used to make a uniform film, it is difficult to design a custom profile of film thickness distribution under various constraints. Considering this situation, we propose a parameter design method to control a spatial distribution in a custom profile with a parameter design. Three regression parameters corresponding to feature quantities of a distribution are designed as multi-objects. The effect of the method will be verified for an electric plating process as a case study. Also an application to control the profile based on this approach will be introduced.},
 pages = {35--46},
 title = {Parameter Design of Film Forming Process to Control Spatial Distribution of Film Thickness},
 year = {2017}
}